@misc{Stachura_Regina_Analiza, author={Stachura, Regina}, howpublished={online}, school={Uniwersytet Jana Kochanowskiego w Kielcach}, language={pol}, abstract={Nanotechnology is one of the dynamically developing technologie®, the aim of which is to create and use structures, devices and Systems in the atomie, molecular and macromolecular scalę of length. The size-dependent properties of nanomaterials make them attractive for many physical (structural, electronic, optical and magnetic) and Chemical (e.g. catalytic) applications. In recent years, sensitive, spectroscopic analytical methods that provide Information on the structure and properties of nanolayers have also developed significantly. These methods include, among others: X-ray reflectivity (XRR) and Grazing Incidence X-Ray Fluorescence (GIXRF). Techniques for modifying metal, semiconductor and insulator nanolayers, to obtain materials with new desirable properties, are also of fundamental importance for the nanotechnology industry. One of the promising and currently developed technologies for modiiying nanolayers using ions is irradiation with low-energy highly charged ions (HCI). Highly charged ions have an additional potential energy to their kinetic energy. This energy is deposited on the surface and in the first few nanometers below the surface of the materiał, leading to the formation of various surface nanostructures such as hillocks, pits and craters. The nanostructures formed on the surface affect its morphology (e.g. roughness), which can be used, for example, to control the ratę of Chemical reactions, and due to their size in the nanometer scalę, quantum effects can also have a significant impact on their properties. The aim of this thesis was to conduct the analysis of Ti and TiOz nanolayers irradiated with low- energy Xeq+ xenon ions in highly charge States (q = 25,30, 35), and to determine the possible impact of this process on the morphology of the irradiated surface. The analysis was carried out using X-ray reflectometry (XRR) and low-angle X-ray fluorescence (GIXRF) with synchrotron radiation excitation. These methods make it possible to determine the density, thickness, roughness and distribution of elements depending on the depth (depth profiles) for mdividual nanolayers in multilayer samples with thicknesses in the nanometer scalę. An important aspect of the work was also to develop the sample analysis procedurę and the assessment of the usefulness of the techniąues. Irradiation of the nanolayers was carried out at the Surface Physics Laboratory of the Institute of Phy sics, Faculty of Natural Sciences, Jan Kochanowski University in Kielce, and studies using XRR and GIXRF methods induced by synchrotron radiation were perfonned at the Elettra synchrotron in Italy.}, abstract={The first chapter introduces the concept of a thin layer and discusses the basie properties of nanolayers. The following chapters describe the physical basis of the XRR and GIXRF methods and discuss the properties of synchrotron radiation. Then, the basie properties of HCI, the processes occurring during their interaction with solids. and the EBIS accelerator, which was used to irradiate Ti and TiO: nanolayers tested in the work, were discussed. In the 6 chapter, the samples used for research and the irradiation process are discussed. Next, XRR and GIXRF measurements carried out on the Elettra synchrotron are discussed. Chapter 8 discusses the XRREG program for simulating reflectometric curves of multilayer samples. Chapters 9 and 10 present the results of the analysis of reflectometric and fluorescence curves obtained by, respectively, the XRR and GIXRF methods, taking into account the model of the structure of titanium and titanium dioxide nanolayers, adopted on the basis of literaturę data and simulations. As a result of the analysis of experhnental data for samples irradiated and not irradiated with ions, it was shown that irradiation with ions significantly affects the structure of the studied nanolayers. It was also shown that XRR and GIXRF methods induced by synchrotron radiation have sufficient sensitivity to determine the surface change aftermodification with high charged ions.}, type={rozprawa doktorska}, title={Analiza powierzchni nanowarstw Ti i TiOշ modyfikowanych wysokonaładowanymi jonami Xeq+ z wykorzystaniem metod XRR i GIXRF ze wzbudzeniem promieniowaniem synchrotronowym}, }